EDN

New CMP process for sub-100nm copper and low-k wafers

ACM Research, a two-year-old Californian company, says it can see the end of the road for chemical mechanical polishing (CMP), and is looking to move in on the market with a non-contact process. It ...
Yahoo Finance

Chemical Mechanical Planarization Slurry Market Size Worth $2.7 Billion by 2030 - Manufacturers' Growing Investments in Semiconductor Wafer Fabrication Materials

Newark, Dec. 08, 2022 (GLOBE NEWSWIRE) -- As per the report published by The Brainy Insights, the global Chemical Mechanical Planarization (CMP) slurry market is expected to grow from USD 1.5 billion ...
EDN

Applied drives CMP process control down to 45 nm and smaller

To allow real-time control of dielectric chemical mechanical planarization (CMP) processes to the 45 nm device node and beyond, Santa Clara, Calif.-based semiconductor manufacturing equipment leader ...
AZOM

Surface Metrology for In-Situ Pad Monitoring in Chemical Mechanical Planarization (CMP)

Chemical Mechanical Planarization (CMP) is a critical process in the semiconductor, LED wafer, and hard disk manufacturing industry and is used to achieve the substrate wafer's required planarity.
Yahoo Finance

Global Chemical Echanical Planarization (CMP) Equipment and Consumables Market 2020: Technology Trends, Products, Applications, and Suppliers of Materials and Equipment

Dublin, Oct. 16, 2020 (GLOBE NEWSWIRE) -- The "CMP Equipment and Consumables: Market Analysis and Forecasts" report from The Information Network has been added to ResearchAndMarkets.com's offering.
AZOM

Using 3D Optical Profiling for Full-Field Hotspot Detection

Chemical mechanical polishing (CMP) – also known as planarization – has long been the most commonly employed technique for smoothing and flattening wafer surfaces during the fabrication of ...
Business Wire

Quartz Unlimited LLC. Announcing the Availability of Quartz Wafers for CMP Tools for Applied Materials Mirra, Mirra Mesa and Reflexion Family of Machines

BOCA RATON, Fla.--(BUSINESS WIRE)--June 28, 2005--Quartz Unlimited LLC. is offering a cost saving alternative of using reclaimed TEOS or thermal oxide dummy wafers for CMP(a) tools retaining ring ...